BOC Edwards has announced that it has sold its 2000th iGX pump. This is a major milestone for the product line, confirming the iGX's position as the de facto dry pump standard within the semiconductor industry for clean to medium-duty applications. Typical tasks for the pump include load lock, transfer, metrology, lithography, PVD process and pre-clean, RTA, strip/ash, oxide, silicon and metal etch, and implant sources.
"We are very proud to have achieved this goal," said Chris Shaw, global product manager for semiconductor dry pumps at BOC Edwards. "The iGX has rapidly become a mainstay in our product line and we expect it to continue in that role. It is particularly gratifying to realise the level of customer confidence and satisfaction that these sales denote. In addition to a feature set that seems to be a near perfect fit with our customers' requirements, the iGX has established an excellent reputation for reliability."
The iGX Series sets the standard for zero maintenance between major overhauls. Its high efficiency design provides continuous pumping throughout the pressure range and reduces utility costs, lowering the cost of ownership. Ethernet connectivity permits key data to be viewed via web pages, and the iGX modular design allows users to tailor each pump to suit individual fab requirements.
