The SAES Getters Group and Innovative Micro Technology (IMT) have agreed to dismiss all claims and counterclaims in the lawsuit SAES Getters S.p.A. and SAES Getters USA, Inc. v. Innovative Micro Technology, Inc. that was filed in the US District Court for the Central District of California, Los Angeles Division in April 2007. The settlement between the parties includes a withdrawal by IMT from the selective getter deposition market for MEMS devices and a long-term supply agreement from SAES to provide its patented PageWafer services to IMT.
"SAES is pleased with the agreement reached," said Massimo della Porta, SAES Getters Chief Executive Officer. "We are confident that by this agreement both companies will be able to focus upon their core competencies to cooperatively provide the finest in high performance MEMS devices."
"IMT is very pleased to have entered a mutually beneficial Supply Agreement with SAES," added Dr. John Foster, CEO of IMT. "Our relationship guarantees that our customers will continue to receive the highest quality and state-of-the-art services for making MEMS, combining IMT's development and manufacturing prowess with SAES' getters."
Patented by SAES Getters and adopted in wafer-level packaged MEMS, PageWafer technology is capable of providing a wafer with a patterned getter film, a few microns thick, that can be placed onto specific surfaces of cavities of in a variety of configurations. By providing maximized sorption of all active gases like H2O, O2, CO, CO2, N2 and H2, PageWafer promotes the long term stability of vacuums and inert gas atmospheres in wafer-to-wafer hermetically bonded MEMS devices.
