This year at Semicon China, Alcatel Vacuum Technology will present a range of new products and solutions for the semiconductor, photovoltaic and MEMS industries.
Vacuum pumping solutions include the A1003P - a new range of lower power consumption dry pumps for medium applications which the company says will dramatically reduce fab operating costs. Also new are the ATH3200MT and the ATH2300M - two maglev hybrid turbomolecular pumps designed for high pressure, high throughput pumping needed for semiconductor and other thin film coating applications.
Another new product on the stand will be the Adixen Pod Analyser (APA). This product measures POD environment quality in real time with ppbv level sensitivity and is designed to provide advanced solutions in today's and tomorrow's clean room technology.
Leak detection products on display will include the new ASM310, a dry high mobility leak detector for maintenance tasks in the Semiconductor Industry. AVT will also be introducing the H2000 Plus hydrogen leak detector. The company says this is the ultimate tool for leak detection and leak locating using diluted hydrogen as tracer gas, finding leaks down to 5x10-7 mbarl/s.
