Pfeiffer Vacuum has introduced the OnTool booster pump, which it claims is the first turbopump that goes from atmosphere to high vacuum. The OnTool booster pump is ideal for clean applications that operate without any particulate matter, corrosive gases or condensation. Its applications range from load locks in the semiconductor industry to industrial coatings and research and development. In addition, this pump can be used as a standalone pump or as a backing pump for turbopumps.
Until now, achieving high vacuum for many applications required a combination of high-vacuum pump and a backing pump. But the OnTool booster pump is a one-pump solution that eliminates the need for a backing pump. This is due to its extremely high pumping speed of 130m3/h and an ultimate pressure of less than 1x10-5 mbar.
The OnTool booster pump has a low vibration level that prevents wafer or critical parts movement and a compact size the permits direct mounting to tool. All these features add up to a high performance vacuum pump with a low facilitation cost.
