A new range of vacuum compatible optical encoders from Renishaw offers all the benefits of the established RG2 linear and angle encoder systems to deliver a non-contact patented filtering optical scheme, high accuracy and high speed for UHV applications.
Renishaw's vacuum range has been specially constructed from clean UHV compatible materials and adhesives to give low outgassing rates and a clean residual gas analysis (RGA). The RGH20F UHV is designed for use with Renishaw's 20 micrometre RESR angle encoder to provide precision feedback for rotary motion in UHV environments. These readheads also feature reduced current consumption to minimise heat dissipation.
The RGH20F UHV and RGH25F UHV readheads are for use with the RGF interface that incorporates automatic gain control and unique self-tuning adaptive electronics which, combined with filtering optics, ensure excellent signal integrity and low cyclic error. The RGF interfaces are available with resolution options of 0.2 micrometers to 10 nanometres. The RGH25U UHV readhead is for use with the RGB25 interface, which offers a wide selection of output configurations and features an integral set-up LED for quick and easy installation.
All of these readheads are supplied with an RFI screened UHV compatible cable as standard. The readheads are suitable for a wide range of applications, including wafer handling/testing, wafer fabs, scientific instruments, spectroscopy, vacuum inspection equipment, rotary tables and many more.