The latest developments in the semiconductor industry demand controllable pump-down sequences where minimal turbulences, low particle count and reproducibility of the flow are a must. To meet these requirements, appropriate valves in the pump lines are essential. The solution from VAT Vacuum Products is the Series 29 valve with soft-pump function for reduced turbulence during initial pump down.
VAT's new Series 29 valve provides an absolute scale for flow adjustment, and is designed to ensure easy, fast, precise and repeatable adjustment. Competitively priced, the Series 29 is also easy to service, with no adjustment required.
