As the need to maximize operating efficiency and minimize production costs continues to grow, manufacturers using thin film deposition processes seek equipment that will increase target utilization, product throughput and system ROI. Over the years, rotating cylindrical magnetrons have become commonplace in the architectural glass coating industry due to their inherent ability to hold more useable target material than a planar magnetron with the same spatial area, and their improved target utilization.
Now, Angstrom Sciences has developed the Onyx-Revolution with a new magnet array design to improve rotating cylindrical magnetron performance in flat panel display and web coating applications. Taking advantage of its profiled magnet design, Angstrom Sciences has improved the rotating cylindrical magnetron's performance by creating a deposition profile that is closer to normal between the source and the substrate. The improved deposition profile offers reduced debris accumulation on the chamber walls, allowing for longer runtimes and higher throughput for industrial applications.
Further to this inherent power savings, the Angstrom Sciences magnet array offers a higher magnetic field intensity, which allows the sputtering process to run at lower power levels while maintaining typical deposition rates. Field-testing has verified a power savings of 20 percent and target utilization of 92 percent.
Angstrom Sciences has paired its standard robust design criteria with this high power supported cantilever rotating cylindrical magnetron, which comes equipped with: an optimized electrical transfer design to deliver high power while avoiding arcing as well as reduced brush wear and debris; and an NW quick connect water to vacuum seal for Quick target changes, shorter down times and increased production. Further features include a universal and cost effective magnet design with customized turnarounds for standard, dog boned or collared targets.
Lightweight, and easily serviced, the product uses many off-the-shelf components for low-cost, long-term investment, and is backed by the company's standard two-year fully backed warranty. The new patent pending technology, available in 6in, 5in, 4in lengths, is designed for in-line systems and is compatible with both horizontal and vertical applications.
