BOC Edwards showcased two new turbomolecular vacuum pumps - the STP-XA4503C and the STP-iXL455 - at SEMICON Japan 2006, which took place in December in Makuhari Messe, Chiba, Japan.
The STP-XA4503C turbomolecular pump offers high performance in the process pressure range of high vacuum to 2,000 sccm process flow, with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition. This new turbomolecular pump has been designed to handle both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.
The STP-iXL455 turbomolecular pump is geared for electron microscopy, metrology, lithography and other vibration-sensitive applications in semiconductor processing. It features an innovative bearing and motor drive system, providing a considerable reduction in vibration compared to previous-generation turbo pumps. A compact, integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.
