The OnTool DryPump from Pfeiffer Vacuum is a compact, multi-stage dry pump that is especially suitable for use in semiconductor technology, in laboratory environments as well as for applications in the coating industry. It has earned a proven track record in combination with Roots pumps and turbopumps. Both pump-down of corrosive or condensing media as well as pumpdown of load locks are possible. The OnTool DryPump is also suitable for cleanroom applications.
A key feature of the pump is its_low total cost of ownership. Installing the pump directly into or on the tool produces savings in both capital investment and installation costs. There is no need for costly and cumbersome backing vacuum lines. The hermetically sealed pumping system and gearbox assures longer service life, lower leakage rates and less service expense. Its contactless, non-wearing sealing technology guarantees a highly reliable operation. Vertical or horizontal installation affords the user considerable space savings.
