The M-824 Hexapod 6-Axis micro-positioning and alignment system from nano-positioning specialist PI provides high resolution motion in six degrees of freedom. It is designed to work in a vacuum and combines multi-axis motion to 45mm (linear), 25 degrees (rotation) with sub-micron resolution and repeatability-ideal for alignment and precision positioning tasks.
The greatest Hexapod advantage is its compact size compared to conventional six-axis positioning systems, a fact that is especially beneficial in applications in vacuum chambers, where space is at a premium.
PI says typical applications will include semiconductor technology, multi-axis alignment of optics, X-ray microscopy, and X-ray monochromators.
Compared to conventional stacked 'serial' kinematics 6D micro-positioning systems, the Hexpod (parallel kinematics) approach has a number of advantages. In particular, it offers a smaller envelope for easy integration, and provides higher stiffness and minimised inertia for faster response and alignment. The absence of moving cables (and therefore of friction) ensures increased reliability and repeatability, and multi-axis repeatability is further increased because there is no accumulation of runout errors. Also, the centre of rotation can be changed with one software command.
The M-824 Hexapod offers a design resolution of 0.007 microns, and is vacuum compatible to 10-6hPa. Highly compact, it measures just 280mm in diameter by 190mm in height, with linear travel ranges to 45mm and rotary travel ranges to 25 degrees. Payload capacity is 10kg.
PI is a leading manufacturer of nano-positioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard and custom precision products with piezoelectric and electromagnetic drives for over 35 years.
