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Pirani/cold cathode transducer offers very wide range

Thyracont Vacuum Instrumentsvisit website

 

Thyracont has expanded its Smartline range of intelligent vacuum transducers with the launch of the VSM72MV, which offers a measurement range from 1000mbar to 5x10-9mbar. The device uses a patented Thyracont technology which extends measuring whilst protecting the sensor and improving vacuum life.

Applications for the new transducer include analysis instruments, coating plants, process engineering, controlling fine to high vacuum, sputtering appliances and vacuum furnaces. A typical application might include the optical coating of mirrors for laser resonators, where the typical process pressure lides above 2x10-3mbar. The vacuum transducer has to be able to monitor both the process pressure during the coating and the available minimum pressure of 10-6mbar in the vacuum chamber. In a standard Pirani/cold cathode device, the continuous operation above 10-3mbar can quickly result in early wear and tear of the sensor.

In the VSM72MV transducer, by contrast, a patented impulse Pirani with extended range activates the cold cathode only below very low pressures. Further the transition between the two sensors can be configured according to the applications requirements. For the coating application, this means the entire process can now be monitored by the Pirani. The cold cathode is protected because it is only active when the appliance pumps down to minimum pressure. Thus the availability of the coating plant improves significantly.

The VSM72MV features a robust cold cathode sensor and a robust, elastic Pirani filament. The device features low thermal and electrical interference with the vacuum process, excellent ignition characteristic, and an insensitivity against irruption of gas. Outputs include 0-10V logarithmic or digital via an RS485 interface.