ILMVAC reports that its CDK turbomolecular pump systems are compact, high vacuum systems with a turbomolecular pump, a three-stage diaphragm pump for backing (with ultimate pressure better than 1mbar), a solenoid valve in the tube of the backing vacuum, a fan for cooling and a power supply. The components are perfectly tuned to each other to provide maximum vacuum power and ultra short evacuation intervals.
The pump system can achieve ultimate pressures to 5x10-7mbar, and
offers a high pumping speed up to 77 l/sec. This high pumping speed of the backing pump provides speedy evacuation. The solenoid valve is included to close the vacuum connection to the low vacuum side as soon as the system reaches the ultimate pressure, and the backing pump is switched off automatically. This prevents venting of the high vacuum side, and results in longer life of the system, reduced energy consumption, low noise levels and longer service intervals.
The dry running hybrid antifriction bearing of the turbomolecular pump prevents any contamination of the vacuum by grease, oil or composite materials. Hydrocarbon spectra of the remaining gas are excluded by the construction of the system.
