EBARA has extended its VOS range of dry vacuum pumps with the launch of the VOS 300. The VOS 300 is a 175 CFM multistage lobe pump designed for on-board or close to the process tooling for clean and light duty applications such as load lock and SEM tasks.
The company asserts that the VOS series has the highest pumping speed to footprint ratio in the industry, claiming that VOS series pumps are lighter, more compact and pump down faster than most point-of-use pumps on the market.
The pumps also deliver a low cost of ownership, with their robust, proven lobe style design. A high performance brushless DC motor is standard across the range, with digital and analogue signals available for interface to process tools. The pumps are SEMI S2 assessed, NRTL listed and CE marked. No nitrogen purge is required, suiting the pumps to clean room applications.
