Brooks Automation Granville-Phillips has announced the release of a micro-ion implant gauge that is optimized for implant source and beam-line applications, and offers a 300 percent or more increase in gauge lifetime.
Granville-Phillips worked closely with a major implant equipment supplier to increase source-region gauge life, beamline response time and cleanliness, and to address other implant equipment process challenges to improve system performance and gauge cost-of-ownership. The micro-ion implant gauge includes implant specific gauge baffling solutions, optimized gauge control electronics and improved thermal management that dramatically improves gauge-life performance and measurement accuracy.
The company reports that major end-users are currently evaluating the micro-ion implant gauge performance in a retrofit application and realizing greater than 300% improvement in gauge lifetime.
