Brooks' CTI-Cryogenics On-Board IS 8F XP cryopump has been optimized for next generation PVD processes and offers over 40 percent improvement of mixed gas capacity. By providing such a large improvement in capacity, PVD processes may be optimized for new technology nodes without impacting tool availability due to increased regeneration cycles. On-Board IS XP has been tested to be process transparent and is 100 percent compatible with the existing industry standard On-Board IS 8F PVD solution.
On-board IS 8F XP is available for new equipment immediately and is field up-gradeable for the existing installed base of over 3000 On-Board IS 8F PVD pumps.
On-board IS 8F XP includes all the proven benefits of the On-Board IS platform. On-Board IS high pressure operation and innovative compressor design delivers 20 percent less run time power consumption than other systems. On-Board IS intelligent helium management distributes cooling power to each pump when needed, enabling stable vacuum performance over several years of running high heat load processes. On-Board IS intelligent helium management has enabled customers to run six cryopumps on one compressor for several years in a high volume production environment without sacrificing vacuum performance.
