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Tiny linear motor moves with nanometer precision

PI (Physik Instrumente)visit website

 

PI has introduced the N-310 NEXACT miniature ceramic linear motor actuator. Non-magnetic and vacuum compatible, with a self-locking design, NEXACT is a patented, high-precision, high speed linear motor actuator developed to bridge the gap between micro- and nanopositioning devices.

Already the winner of a technology award from the semiconductor community, NEXACT is highly compact at just 25x25x12mm. It can deliver a 10N push/pull force, and offers 20mm travel at speeds up to 10mm/sec with picometer precision.

In operation, piezoceramic bending elements act on the ceramic runner, connected to the moving part of the application. The length of the runner can be chosen as required, force capacity, resolution and velocity depend on the piezo geometry and are also scalable. To move the runner over longer distances the stepping mode is used, whereas for distances smaller than 7 micrometres, the linear (sweep) mode enables high-dynamics positioning with resolutions far below one nanometer. The special drive design reduces the operating voltage to 40V and below.

In contrast to servo or stepper motor actuators, the piezo stepping elements effect linear motion directly, without the need to transform rotation with gears and leadscrews. Backlash and wear are eliminated and the drive is maintenance-free. NEXACT actuators exhibit high stiffness and are self-locking when powered down with nanometer position stability, and zero dissipation or servo-dither at rest.