Advanced Energy Industries highlighted the new Paramount RF power-delivery system during SEMICON Europa 2007. The Paramount RF power system enables faster transitions, shorter steps and reduced process times to achieve unprecedented control, accuracy and repeatability in ever more complex applications.
Precise power delivery and optional RF pulsing allow more accurate process control and uniformity when etching and depositing anti-reflective coatings, hard masks, cap layers and etch-stop layers required by the next-generation nodes. The Paramount system's measurement technology and optional ultra-fast frequency tuning enable it to deliver exceptionally precise power at 13.56MHz fixed or variable frequencies.
