A new range of XY stages from ALIO Industries - available in the UK from Micromech - have a choice of linear servomotors or ceramic servomotors with Renishaw tape scale, Invar scale and or RLE Laser closed loop position.
The demand for more precision open centre stages than previous products has led ALIO to introduce what it claims are the most precise mechanical bearing open centre stages commercially available in the world market for atmosphere or UHV environments.
The open centre XY designs cover travel distances from 2 mm to over 400mm in each axis with large apertures for a wide range of applications needing not only nano repeatability and accuracy of position but extreme flatness and straightness of motion. The stages are tested and qualified with a Renishaw ML10 laser interferometer traceable to NIST, giving ALIO true data and not optimistic spec sheet precision.
The ALIO 150mm travel standard precision XY stage has X and Y flatness and straightness of linear travel of less than 2 microns (+/- 1 micron) per axis. With Invar scales the repeatability is less than 150 nm (+/-75 nanometres) with an accuracy less than 1 micron without laser calibration. With less expensive tape scales on the 150mm XY the accuracy un-calibrated is less than 7 micron (+/- 3.5 microns) over the range with less than 0.4 microns of repeatability while maintaining the precision of flatness and straightness previously mentioned.
