Absolute Vacuum Services is pleased to announce the addition of the new Toyota Semicondutor dry vacuum pumps to its range. Users benefit from low costs of ownership, with low service and running costs. Indeed, Absolute Vacuum reckons users could achieve up to 50% cost savings over alternative products.
The T-series integrates all the know-how that Toyota has cultivated in its experience in the semiconductor field and emerging technologies. Maintaining interchangeability with earlier series of pumps, the new T-series delivers improvements in reliability for use in the harshest of process environments. The pumps are ideally suited for semiconductor processes, delivering superior performance and reliability.
The Toyota T100P-H DryPump is built around Roots technology to minimise power consumption. A high efficiency motor and reduction of mechanical losses delivers best-in-class power consumption of 1.7kW. The T600-H DryPump is a compact and lightweight design, achieving a best-in-class compact footprint through the effective utilisation of FAB space.
The T1000-H DryPump offers a number of improvements over conventional designs. The adoption of a newly developed rotor improves power handling, while optimising N2 purge flow improves by-product removal. The use of motor motion control to increase the start-up torque delivers improved startability after shutdown. Precise temperature control reduces by-product deposition.
The T1200-H and T1800-H DryPumps assure best-in-class quietness thanks to the adoption of noise reduction technology cultivated through automotive technology. The low vibration design makes the pumps suitable for cleanroom environments.
All the pumps in the T-series carry the assurance of the Toyota reputation for guaranteed quality.