Practical Vacuum 2007 Review
Running at the NEC, Birmingham, UK over February 14 & 15, 2007, Practical Vacuum and Semiconductor Processing again proved to be the must see event for all aspects of vacuum technology, living up to its billing as the best place to find all that's new and emerging in the vacuum and semiconductor processing industries.
Exhibitors at Practical Vacuum included manufacturers, agents and distributors showing products and services allied to industry interests including analysis and inspection, coatings and thin film, cryogenics, CVD, deposition sputtering, electronics, electronics materials and processing, etching and resist stripping, microscopy, plasma science and techniques, process gas, scientific instrumentation, semiconductors, vacuum metallurgy and wafer manufacture.
Vacuum pumps and systems
Oerlikon Leybold Vacuum offers a wide range of advanced vacuum solutions for use in manufacturing and analytical processes, as well as for research purposes. The company’s core capabilities centre on the development of application- and customer-specific systems for the creation of vacuums and extraction of processing gases.
The product range of Oerlikon Leybold Vacuum comprises fore vacuum pumps, high vacuum pumps, vacuum systems, vacuum gauges, leak detecting instruments, flanges, fittings and valves, as well as consulting and engineering of complete vacuum solutions for specified customer applications.
For more than 100 years, Pfeiffer Vacuum has been setting milestones in vacuum technology with its products. The company’s comprehensive line of products and services range from individual components to complex vacuum systems. Among its innovations, Pfeiffer Vacuum can claim the invention of the turbomolecular pump. Recently introduced products that were on show at the exhibition include a durable, reliable and compact vacuum system for mobile mass spectrometry. Able to run at lower power levels, Pfeiffer Vacuum's compact vacuum system integrates a turbopump and a specially designed dry diaphragm pump that allows analytical equipment to provide real time analysis in the field.
The mobile vacuum system runs on 24 volts with a power save mode when idling. The system is available with TMH 071 or TPD 011 l/s turbopumps and the MVP 006 - a new diaphragm backing pump. The system can be configured to fit analytical OEM requirements.
For high quality replacement parts for vacuum pumps and systems, visitors to Practical Vacuum needed to look no further than Precision Plus Vacuum Parts stand. Precision Plus Vacuum Parts is the recognised leader in providing high quality, low cost vacuum pump replacement parts for all major vacuum pump companies including Alcatel, BOC Edwards, Busch, Ebara, Fisher Scientific, Galileo, Kinney, Leybold, Pfeiffer, Precision Scientific, Rietschle, Stokes, Turbo Pumps, Varian and Welch. Parts include filters, rotors, shafts, plates, stators, KF fittings, FDA-approved oils, repair kits and more. Remanufacturing capabilities are also available. Precision Plus is the largest manufacturer of OEM compatible vacuum pump parts with over 4,000 parts and 650 pump models guaranteed to meet
On its stand, Varian Vacuum Technologies showed off its product lines which include primary and high-vacuum pumps, ultra-high vacuum pumps, vacuum instrumentation and accessories, and helium mass spectrometer leak detectors. The company's vacuum roots run deep. The ion pump, used for achieving ultra-clean vacuum environments, was invented by Varian Associates in the 1950s, initially for evacuating its own high-frequency microwave tubes.
Varian recently announced the introduction of two new high throughput vacuum pumps, the Turbo-V 81-M and the Turbo-V 81-T. The Turbo-V 81 series pumps can increase instrument sensitivity in application areas that demand high vacuum integrity such as mass spectrometry, electron microscopy, and high energy physics.
The Turbo-V 81-T represents a cost-effective solution that in a more compact design offers significantly higher performance than most turbo pumps of the same class. The Turbo-V 81-M represents a major step forward in high throughput and high foreline tolerance applications, thanks to patented MacroTorr stages: the higher foreline tolerance of the Turbo-V 81-M allows the use of smaller primary pumps, reducing overall system costs. Both models offer greater pumping speeds with reduced power consumption compared to the Varian Turbo-V 70 series pumps that they replace.
Components for high vacuum and UHV
Meeting the needs of high vacuum system builders and research laboratories, Allectrais a vacuum components manufacturer and distributor offering a range of components for high vacuum and UHV. These include feedthroughs, wires and cables, viewports, fibre optics for vacuum, motors, vacuum chambers, flanges and fittings. Additionally, Allectra offers explosion bonded aluminium to stainless steel transitions. Allectra's product range spans more than 1000 products for use on vacuum systems.
In addition to its own manufacture, Allectra offers a number of high quality products sourced from reliable suppliers. Allectra represents Kohzu Precision, which makes precision movement stages for use in air and vacuum applications for both research and industry. Allectra also represents Atlas Technologies which manufactures aluminium-to-stainless steel transition flanges - now in use on the SOLEIL synchrotron.
On its stand, Caburn-MDC Europe showed a complete range of high and ultra high vacuum components for the European scientific community. Caburn-MDC Europe is the exclusive European distributor for both MDC Vacuum Corporation and Insulator Seal Incorporated, working together with these companies to provide an extensive portfolio of vacuum components, from basic flanges to innovative valves, feedthroughs and deposition equipment.
LewVac LLP is a world-wide manufacturer and distributor of high and ultra high vacuum components. The company’s broad range of components is sourced from selected manufacturing facilities around the world, enabling it to offer quality products at competitive prices. Products range from standard system components such as flanges and fittings, electrical and optical feedthroughs, to sophisticated thin film monitoring instrumentation and bespoke vacuum chambers.
Nor-Cal UK introduced some brand new products at the exhibition, including the JV series valves which are available in both low-cost aluminium and high performance stainless steel bodies. The JV series is designed to meet the demanding high-cycle requirements of semiconductor equipment manufacturers, yet offer the researcher a cost-effective solution for UHV system roughing. Nor-Cal UK is the sole UK distributor for California based Nor-Cal Products Inc, one of the world's market leaders in the manufacture and supply of stainless steel vacuum components, including high vacuum and ultra high vacuum flanges, fittings, valves, foreline traps, feedthroughs, manipulators and heater jackets. The company’s throttling control valve technology with both throttling butterfly and throttling sealing pendulum valves are proving to have unmatched pressure control performance. And Nor-Cal’s wide range of angle valves, inline valves and gate valves have become an industry standard. A wide range of vacuum foreline traps and foreline heater jackets prevent by-product build-up reducing foreline and vacuum pump maintenance.
Nor-Cal’s vacuum components are used in high and ultra high (UHV) vacuum applications such as semiconductor fabrication for both the equipment manufacturers, end users and installation contractors. Constant investment in its manufacturing allows the company to offer high quality, reliable vacuum components at competitive prices.
As a specialist in UHV motion and heating products, UHV Design is setting the pace in innovative product development. Reflecting the industry’s desire for next generation solutions, the company’s focus is to provide exemplary products that stand the test of time. Excellence is ensured through the in-house control of all disciplines from design, through to manufacture, assembly, test and after sales support. UHV Design’s customer-orientated approach, combined with an endless drive to achieve world-renowned products is the key to our continued success.
New products on display at this year’s show included a high performance six-axis manipulator with true UHV heat/cool capability based on the company’s Cold Lance technology, for which it has filed a patent application.
Other recent developments include the enhancements of its innovative LPP (Linear PowerProbe) range of magnetically coupled linear feedthroughs with the option of motorised operation. Combining the probes' high linear thrust (up to 180N) and zero-backlash characteristics with the convenience of DC/stepper motor-driven automation results in a powerful sample delivery system for remote control applications. With this latest enhancement, the motorised Linear PowerProbe vastly reduces the cost of automated sample transfer systems, whilst delivering high thrust, rotation-free linear motion.
Instrumentation and beyond
Creative Group, one of Europe’s leading vacuum technology specialists, used the show to demonstrate its new online service, Creative Direct (www.creative-direct.biz). Customers can securely purchase online from a choice of over 300 vacuum fittings, components, valves and gauges. A full specification of each component is provided and a wide range of products are available for both KF and ISO fittings. Many products are offered for ex-stock delivery providing customers with a fast and responsive service.
The company’s extensive online vacuum product range includes bellows, connectors, centering rings, clamps, flanges, tabulations, weld sockets, foreline traps, valves, switches and gauges. Creative Group’s quality management system is approved to BS EN ISO 9001:2000, AS 9100 Rev.B and AS 7100 for welding and brazing. In addition to manufacturing standard vacuum components, Creative Group also offers a ‘Design to Production’ sub-contract service with extensive facilities for CNC machining electron beam welding, TIG & MIG welding, plasma and resistance welding, vacuum brazing, induction soldering and welding and vacuum heat treatment.
Seals and connection products
Ceramic Seals is an independent company dedicated to the manufacture of a comprehensive range of quality ceramic-to-metal seals, sapphire-to-metal seals and related products. Ceramic Seals offers over 40 years experience in design and manufacture of ceramic-to-metal seals for operation in ultra-high vacuum, high pressures and at extreme temperatures. The company’s product ranges include electrical/fluid feedthroughs, isolators, cable terminations, sapphire/quartz lenses and windows.
Founded in 1980 on a technology core of FerroFluid magnetic liquid and Ferrofluidic sealing products, Ferrotec and its product portfolio have grown to meet the evolving needs of its customers. Ferrotec is a world leading manufacturer, marketer, and distributor of advanced material, component, and assembly solutions used in a broad array of end products, manufacturing systems, and industries.
Recently the company announced significant improvements to the standard ferrofluid magnetic liquids which provide the core sealing function in its Ferrofluidic vacuum rotary feedthroughs. Ferrotec vacuum feedthroughs are used in semiconductor manufacturing equipment, vacuum chambers, and other clean and controlled process environments. With changes to the ferrofluid that is used inside the feedthrough to form the rotational seal, Ferrotec's customers can benefit from reduced operating torque, reduced vapour pressure, and better thermal stability in demanding process environments.
There were further options for seals on the SCT stand. SCT is a world leading ISO certified, integrated manufacturer of ceramic components, ceramic-to-metal and sapphire-to-metal seals. SCT offers custom-made solutions used in harsh environment for high tech markets such as medical, aeronautics, aerospace and research in high energy physics. SCT concentrates its know how on one unique plant and masters the entire process from ceramic powder to highly engineered brazed metal-to-ceramic components. Applications include envelopes, HV and multipin feedthroughs, HV insulators, ceramic vacuum chambers and other hermetic accessories for high vacuum and UHV applications.
Chambers, vessels and fabrications
The core business of NTE Vacuum Technology is the manufacture of high vacuum chambers/vessels and associated equipment. The chambers and vessels are offered in stainless steel, aluminium alloy, carbon steel (usually Electroless Nickel plated) and Copper. NTE is approved to BS EN ISO 9001:2000 and offers full quality control and traceability on all manufacturing processes. The company supplies the chemical, electronic and nuclear industries and to many Research laboratories both in the UK and in Europe.
Scanwel was established in 1974, to provide a rapid response service to the rapidly expanding market in high vacuum fittings and fabrications. Although the product range has continuously expanded in over 30 years of trading, the overriding philosophy within the company is still customer first. Scanwel takes pride in supplying its academic, government and industrial customers with quality vacuum equipment at competitive prices on time.
Scanwel specialises in producing custom fabrication and chambers, for clean and UHV applications. The company’s custom systems are exactly that, conceived and designed with the customer’s full involvement using Scanwel’s experience and the latest CAD packages. The end result is a product that meets the customer’s full requirements.
In addition, Scanwel manufactures over 5000 products. We carry an extensive stock of its own manufactured hardware, including: viewports; ion pumps and controllers; foreline traps and cold traps; standard vacuum components; heating tapes, jackets and tents; chambers, fabrication and baseplates; conflat, klein and ISO slanges and fittings; angle valves, leak valves and gate valves; and motion, electrical, liquid and optical feedthroughs.
Equipment and consumables
Scotech supplies equipment and consumables for the vacuum, thin film and semiconductor industries. The company’s equipment range covers a diverse range of vacuum and thin film related processes, from the manufacture of potato chips to silicon chips. Application examples include electron beam evaporation, thermal evaporation, sputtering, ion beam deposition, ion implanation, and ion beam and plasma etch.
Kedron Engineering was formed in April 2002 to manufacture and supply a full range of vacuum components, valves and fittings, and to provide an expert subcontract welding facility with an emphasis on helping customers with new product development and manufacturing of completed assemblies. The company specialises in the precision TIG welding of stainless steel, nickel alloys (Hastelloy, Inconel and Monel) and aluminium alloys. Fusion welding of thin sections from 0.1mm thick and upwards and fusion or filler welding of thick sections enables us to process a wide range of products.
Louwers Glass and Ceramic Technologies specialises in the development and production of technical glass and advanced ceramic components of the very highest quality. Products are tailor-made to meet the requirements of customers in a wide range of industries. The company uses the very latest techniques and applies both established and state-of-the-art technologies.
Practical Vacuum and Semiconductor Processing was held at the NEC, Birmingham, UK on February 14 & 15, 2007.
